Ion Beam Etching Ppt

Ion beam machining accuracy.

Ion beam etching ppt.

With its fully reactive gas compatibility the system enables reactive etching processes with enhanced selectivity and rate. The basic dual ion beam sputtering dibs chamber set up as comprises an etching source that precisely directs a neutralised ion beam onto a wafer located in the substrate holder. Normally for good uniformity the 15cm etch source can be used for wafers up to 4 while the 30cm etch source is suitable for wafers up to 8. With the broad beam ion source in this system etch marks of about 10 mm can be achieved at vertical incidence of the beam dependent on the target material and the parameters.

The accuracy of the etching process is considerably high mainly due to the small amount of material removal. Reactive ion etching rie is an etching technology used in microfabrication rie is a type of dry etching which has different characteristics than wet etching rie uses chemically reactive plasma to remove material deposited on wafers the plasma is generated under low pressure by an electromagnetic field high energy ions from the plasma attack the wafer surface and react with it. Practical etching rates vary up to 2000 a 2 x 10 4 mm per min. Full surface ion beam etching on 200 mm wafers the scia mill 200 is designed for structuring of complex multilayers of various materials.

For an exact process control different end point detection systems can be equipped. Ion beam etching or milling is a dry plasma etch method which utilizes a remote broad beam ion plasma source to remove substrate material by physical inert gas and or chemical reactive gas means. Dual beam machine 22 05 2015 en seminar 5 fib nano machining machining sputtering milling chemically assisted deposition and etching gas injection system ion beam induced imaging se and si micromanipulation of small objects 2 µm 2 µm 200 nm 2 µm. Ion beam etching ibe removes material from the etch target by bombardment with directed and precisely controlled ion energies ibe is also referred to as ion beam milling ion beam etching has many applications including nano machining of magnetic transducers mems devices and trimming of surface acoustic wave saw and bulk acoustic wave baw filters.

It enables highly directional beams of neutral ions to control over the sidewall profile as well as radial uniformity optimisation and feature shaping during nanopatterning. Tolerances in the vicinity of 50 å 5 x 10 mm are possible. Like other dry plasma etch techniques the typical figures of merit apply such as etch rate anisotropy selectivity uniformity aspect ratio and. The etch tests were performed using the gatan ion beam etching and coating system pecs.